Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
| Line 11: | Line 11: | ||
===Dry etches:=== | ===Dry etches:=== | ||
*[[/Si etch using RIE1 or RIE2|Si etch using | *[[/Si etch using RIE1 or RIE2|Si etch using RIE2]] | ||
*[[/Si etch using ASE|Si etch using ASE (Advanced Silicon Etch)]] | *[[/Si etch using ASE|Si etch using ASE (Advanced Silicon Etch)]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus|Si etch using DRIE-Pegasus (Silicon Etch)]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus|Si etch using DRIE-Pegasus (Silicon Etch)]] | ||