Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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!colspan="3"|Spin Coat of AllResist SX 6200/2, TIGRE, 09-04-2014 | |||
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!Spin Coater | |||
!Process Parameters | |||
!Comments | |||
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|Spin Coater Manual, LabSpin, A-5 | |||
|60 sec at various spin speed. Acceleration 4000 s-2, softbake 5 min at 150 deg Celcius | |||
|Resist poured directly from bottle | |||
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