Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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!TIGRE
!colspan="7"|AllResist SX 6200/2 spinning on Manual Spinner LabSpin A-5, TIGRE, 09-04-2014
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!Thickness [nm]
!Thickness [nm]
!St Dev
!St Dev
!Uniformity (+/-)
!Comments
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Revision as of 14:24, 10 April 2014

CSAR


AllResist SX 6200/2 spinning on Manual Spinner LabSpin A-5, TIGRE, 09-04-2014
Spin Speed [rpm] Acceleration [1/s2] Spin Time [s] Thickness [nm] St Dev
2000 4000 60
3000 4000 60
4000 4000 60
5000 4000 60
6000 4000 60
7000 4000 60
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