Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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This is done in a drawing tool for mask layout. The output is a file you send to a mask house, which in return supplies you with a number of photolithographic masks. Each mask is a glass plate with a chromium pattern that mimics a layer in your layout. | This is done in a drawing tool for mask layout. The output is a file you send to a mask house, which in return supplies you with a number of photolithographic masks. Each mask is a glass plate with a chromium pattern that mimics a layer in your layout. | ||
Please read more details here: [[ | Please read more details here: [[/Mask Design|Mask Design]] | ||
= Resist Overview = | = Resist Overview = | ||