Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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==Sputtering of Aluminium== | ==Sputtering of Aluminium== | ||
Aluminium may be sputter deposited in either Wordentec of PVD co-sputter/evaporation | |||
*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]] | |||
*[[/Sputter rates for Al PVD co-sputter/evaporation|Sputtering of Aluminium of PVD co-sputter/evaporation]] | *[[/Sputter rates for Al PVD co-sputter/evaporation|Sputtering of Aluminium of PVD co-sputter/evaporation]] | ||
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