Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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| | |1 µm (can go up to 6µm with special settings) | ||
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| | |Depends on FOV and image resolution: | ||
*FOV: 10-90 µm ~8:30 min (256x256 pixels) | |||
*FOV: -10 µm ~4:15 min (256x256 pixels) | |||
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