Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
| Line 103: | Line 103: | ||
|1-20 nm | |1-20 nm | ||
Depends on what SEM you use | Depends on what SEM you use | ||
| | |< 1Å | ||
| | | | ||
|- | |- | ||
| Line 116: | Line 116: | ||
|1-20 nm | |1-20 nm | ||
Depends on what SEM you use | Depends on what SEM you use | ||
| | |Down to 1.4 nm | ||
| | | | ||
|- | |- | ||