Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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'''Baking''' | '''Baking''' | ||
60sec on 110C hot plate | 60sec on 110C hot plate | ||
''' HSQ: FOX-15''' | |||
Spinning curve for[[media:Spin_curve_nLoF2020.pdf| FOX-15]]. | |||
Process parameters making the recipe: | |||
'''Prebaking''' | |||
300sec on 220C hot plate | |||
'''Spinning''' | |||
speed: xxxprm | |||
acceleration: 4000rpm/s | |||
time: 60s | |||
'''Baking''' | |||
120sec on 120C hot plate | |||
120sec on 220C hot plate | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||