Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions
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PolySilicon can be deposited in several Danchip tools. Either it can be sputtered or be deposited in the PolySilicon furnace. In the chart below you can compare the two different deposition methods: | PolySilicon can be deposited in several Danchip tools. Either it can be sputtered or be deposited in the PolySilicon furnace. In the chart below you can compare the two different deposition methods: | ||
==Deposition of PolySilicon using LPCVD== | |||
==Deposition of Silicon using sputter deposition technique== | |||