Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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== Secondary Ion Mass Spectrometry == | == Secondary Ion Mass Spectrometry (SIMS) == | ||
In the Atomika SIMS the samples are bombarded with a beam of either oxygen or caesium ions. When accelerated to high energy and rastered across the sample | In the Atomika SIMS the samples are bombarded with a beam of either oxygen or caesium ions. When accelerated to high energy and rastered across the sample | ||
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These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS. | These charged species are led through a mass spectrometer where a magnetic field is used to deflect them. The deflection increases with charge and decreases with mass and we are therefore able detect and count them according to their mass. This technique is called Secondary Ion Mass Spectrometry or SIMS. | ||
== X-ray Photoelectron Spectroscopy analysis == | == X-ray Photoelectron Spectroscopy analysis == | ||