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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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*Spin coating and soft baking UV sensative resists
*Spin coating UV sensative resists
*Spin coating E-beam resits
*Spin coating E-beam resits
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* AZ5214E manual dispense
* UV sensative resist: AZ5214E, AZMiR701, AZ nLoF 2020
* E-beam resits manual dispense
* E-beam resits: ZEP520A, PMMA, HSQ
* BCB
* Diblock copolymer Poly(styrene-b-methyl methacrylate) P(S-b-PMMA)
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance
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