Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 600: | Line 600: | ||
''' AZ nLoF 2020''' | ''' AZ nLoF 2020''' | ||
Spinning curve for AZ nLoF 2020. | Spinning curve for[[media:AZ5214E_spin_curve.pdf| AZ nLoF 2020]]. | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||