Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum: Difference between revisions

@@ Line 15: / Line 15: @@
 |-
 |-style="background:WhiteSmoke; color:black"
-! Batch size
+! General description
-|
+| E-beam deposition of Mo
-*Up to 1x4" wafers
+| E-beam deposition of Mo
-*smaller pieces
-|
-*12x2" wafers or
-*12x4" wafers or
-*4x6" wafers
 |-
@@ Line 42: / Line 37: @@
 |-
 |-
+|-style="background:WhiteSmoke; color:black"
+! Batch size
+|
+*Up to 1x4" wafers
+*smaller pieces
+|
+*12x2" wafers or
+*12x4" wafers or
+*4x6" wafers
+|-
+|-style="background:LightGrey; color:black"
-|-style="background:WhiteSmoke; color:black"
 !Allowed materials
@@ Line 66: / Line 70: @@
 * Mylar
 * SU-8
-|-style="background:LightGrey; color:black"
+|-style="background:WhiteSmoke; color:black"
 ! Comment
 |