Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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! style="background:silver; color:black" | Chemical information | ! style="background:silver; color:black" | Chemical information | ||
|| None: Only transistions involving inner shell electrons are detected | |style="background:lightgrey; color:black"| None: Only transistions involving inner shell electrons are detected | ||
|| None | |style="background:lightgrey; color:black"| None | ||
|| Chemical state information | |style="background:lightgrey; color:black"| Chemical state information | ||
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! style="background:silver; color:black" | Sample limitations | ! style="background:silver; color:black" | Sample limitations | ||
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! style="background:silver; color:black" | Spatial resolution | ! style="background:silver; color:black" | Spatial resolution | ||
|| Very precise point-like analysis is possible with SEM electron beam. | |style="background:lightgrey; color:black"| Very precise point-like analysis is possible with SEM electron beam. | ||
|| Limited to what is visible in a camera | |style="background:lightgrey; color:black"| Limited to what is visible in a camera | ||
|| Limited to what is visible in a camera | |style="background:lightgrey; color:black"| Limited to what is visible in a camera | ||
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! style="background:silver; color:black" | Depth resolution | ! style="background:silver; color:black" | Depth resolution | ||
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! style="background:silver; color:black" | Detection limit | ! style="background:silver; color:black" | Detection limit | ||
|| Approximately 1 % atomic weight | |style="background:lightgrey; color:black"| Approximately 1 % atomic weight | ||
|| Down to 1 ppb for many elements | |style="background:lightgrey; color:black"| Down to 1 ppb for many elements | ||
|| Approximately 1 % atomic weight | |style="background:lightgrey; color:black"| Approximately 1 % atomic weight | ||
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! style="background:silver; color:black" | Speed of measurement | ! style="background:silver; color:black" | Speed of measurement | ||