Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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! style="background:silver; color:black" | What elements are detected | ! style="background:silver; color:black" | What elements are detected | ||
|| Every element heavier than boron/carbon | | style="background:WhiteSmoke; color:black" | Every element heavier than boron/carbon | ||
|| Every element | | style="background:WhiteSmoke; color:black" | Every element | ||
|| Every element except hydrogen and helium. However, the signal from two substances can overlapp, which can reduce the detection limit | | style="background:WhiteSmoke; color:black" | Every element except hydrogen and helium. However, the signal from two substances can overlapp, which can reduce the detection limit | ||
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! style="background:silver; color:black" | Chemical information | ! style="background:silver; color:black" | Chemical information | ||
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! style="background:silver; color:black" | Sample limitations | ! style="background:silver; color:black" | Sample limitations | ||
|| Vacuum compatible. | | style="background:WhiteSmoke; color:black" | Vacuum compatible. | ||
|| Vacuum compatible. The sample needs to be cut into small (app. 5*5 mm) pieces. | | style="background:WhiteSmoke; color:black" | Vacuum compatible. The sample needs to be cut into small (app. 5*5 mm) pieces. | ||
|| Vacuum compatible. Sample size max 50x50 mm, thickness max 20 mm. | | style="background:WhiteSmoke; color:black" | Vacuum compatible. Sample size max 50x50 mm, thickness max 20 mm. | ||
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! style="background:silver; color:black" | Spatial resolution | ! style="background:silver; color:black" | Spatial resolution | ||
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! style="background:silver; color:black" | Depth resolution | ! style="background:silver; color:black" | Depth resolution | ||
|| The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume. See section 'Spatial resolution using EDX' below. | | style="background:WhiteSmoke; color:black" | The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume. See section 'Spatial resolution using EDX' below. | ||
|| The sputtering of the surface makes it possible to perform detailed depth profiling with extremely good sensitivity and depth resolution. | | style="background:WhiteSmoke; color:black" | The sputtering of the surface makes it possible to perform detailed depth profiling with extremely good sensitivity and depth resolution. | ||
|| Very surface sensitive technique. Signal only from the top layer (a few nanometers deep) can be detected. By using the ion beam etch, the composition of deeper lying layers can be probed. | | style="background:WhiteSmoke; color:black" | Very surface sensitive technique. Signal only from the top layer (a few nanometers deep) can be detected. By using the ion beam etch, the composition of deeper lying layers can be probed. | ||
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! style="background:silver; color:black" | Detection limit | ! style="background:silver; color:black" | Detection limit | ||
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! style="background:silver; color:black" | Speed of measurement | ! style="background:silver; color:black" | Speed of measurement | ||
|| Quite fast and easy | | style="background:WhiteSmoke; color:black" | Quite fast and easy | ||
|| Time consuming | | style="background:WhiteSmoke; color:black" | Time consuming | ||
|| Quite fast and easy | | style="background:WhiteSmoke; color:black" | Quite fast and easy | ||
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