Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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!width="250" style="background:silver; color:black" | XPS | !width="250" style="background:silver; color:black" | XPS | ||
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! | ! style="background:silver; color:black" width="60" | Full name | ||
! | ! style="background:WhiteSmoke; color:black" | Energy Dispersive X-ray Analysis | ||
! | ! style="background:WhiteSmoke; color:black" | Secondary Ion Mass Spectroscopy | ||
! | ! style="background:WhiteSmoke; color:black" | X-ray Photoelectron Spectroscopy | ||
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! | ! style="background:silver; color:black" width="60" | Technique | ||
! style="background:silver; color:black"| Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these X-rays is characteristic of the element they emitted from. | |||
|| Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer. | || Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer. | ||
|| Non destrucive method: X-rays are irridiating the sample, and the energy of edjected photoelectrons is measured. The elemental analysis is possible, since the binding energy of the electrons (and hence the energy of the emitted photoelectrons) are specific for each element. | || Non destrucive method: X-rays are irridiating the sample, and the energy of edjected photoelectrons is measured. The elemental analysis is possible, since the binding energy of the electrons (and hence the energy of the emitted photoelectrons) are specific for each element. | ||