Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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! rowspan="2" style="background:WhiteSmoke; color:black" | X-ray Photoelectron Spectroscopy | ! rowspan="2" style="background:WhiteSmoke; color:black" | X-ray Photoelectron Spectroscopy | ||
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! | ! rowspan="2" style="background:silver; color:black" width="60" | Technique | ||
|| Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these X-rays is characteristic of the element they emitted from. | || Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these X-rays is characteristic of the element they emitted from. | ||
|| Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer. | || Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer. | ||