Specific Process Knowledge/Lithography/Baking: Difference between revisions
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We have two dedicated SU-8 hotplates in C-1. | We have two dedicated SU-8 hotplates in C-1. | ||
Users can control the ramp-time, the baking temperature, and the baking time. | Users can control the ramp-time, the baking temperature, and the baking time. | ||
'''The user manual, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=122 Hotplate 1 (SU8)] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=124 Hotplate 2 (SU8)]''' | |||
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