Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
Appearance
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|Size of substrate | |Size of substrate | ||
| | | | ||
2-6" wafers | |||
| | | | ||
2-6" wafers | |||
|- | |- | ||
|Allowed materials | |Allowed materials | ||
| Line 50: | Line 50: | ||
|Size of substrate | |Size of substrate | ||
| | | | ||
2-6" wafers | |||
| | | | ||
2-6" wafers | |||
|- | |- | ||
|Allowed materials | |Allowed materials | ||