Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions
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|style="background:LightGrey; color:black"|Uniformity | |style="background:LightGrey; color:black"|Uniformity | ||
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*Typical within | *Typical within ±2% | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Process parameters | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Process parameters | ||