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Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions

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|~50Å to 2µm, if thicker layers are needed please ask the furnace team.
|~50Å to 2µm, if thicker layers are needed please ask the furnace team.
|10Å to about 3000Å
|10Å to about 3000Å
|.
|No defined limits
|10Å to 2000Å  
|10Å to 2000Å  
|-
|-
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