Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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==Comparison of the annealing furnaces== | ==Comparison of the annealing furnaces== | ||
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!General description | !General description | ||
|Annealing of 6" wafers. Annealing of wafers from the LPCVD furnaces and | |Annealing of 4" and 6" wafers. Annealing of wafers from the LPCVD furnaces and PECVD2. | ||
|Annealing of wafers from EVG-NIL, PECVD3 and wafers with aluminum. | |Annealing of wafers from EVG-NIL, PECVD3 and wafers with aluminum. | ||
|Annealing of almost materials on silicon | |Annealing of almost all materials on silicon wafers. | ||
|Rapid thermal annealing | |Rapid thermal annealing | ||
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!Substrate and Batch size | !Substrate and Batch size | ||
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*Small samples on a carrier wafer, horizontal | |||
*1-30 50 mm wafers | *1-30 50 mm wafers | ||
*1-30 100 mm wafers | *1-30 100 mm wafers | ||
*1-30 150 mm wafers | *1-30 150 mm wafers | ||
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*Small samples on carrier wafer, horizontal | *Small samples on a carrier wafer, horizontal | ||
*1-30 50 mm wafers | *1-30 50 mm wafers | ||
*1-30 100 mm wafers | *1-30 100 mm wafers | ||
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*Small samples on carrier wafer, horizontal | *Small samples on a carrier wafer, horizontal | ||
*1-25 50 mm wafers | *1-25 50 mm wafers | ||
*1-25 100 mm wafers, vertical and horizontal | *1-25 100 mm wafers, vertical and horizontal | ||
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*Small samples on carrier wafer | *Small samples on a carrier wafer, horizontal | ||
*One 100 mm wafers on carrier wafer | *One 100 mm wafers on a carrier wafer | ||
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!'''Allowed materials''' | !'''Allowed materials''' | ||
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*All processed wafers have to be RCA cleaned | *All processed wafers have to be RCA cleaned, except wafers from LPCVD furnaces and PECVD1. | ||
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*All processed wafers have to be RCA cleaned | *All processed wafers have to be RCA cleaned, except wafers from EVG-NIL, PECVD3 and wafers for annealing of aluminum. | ||
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*Almost all materials, permission is | *Almost all materials, permission is needed. | ||
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*III-V samples | *III-V samples | ||
*Silicon | *Silicon wafers | ||
*Some metals | *Some metals | ||