Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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-[[Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace| A1: Boron Drive-in]]
+[[Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace| Boron Drive-in + Pre-dep (A1)]]
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-[[Specific_Process_Knowledge/Thermal_Process/C2_Gate_Oxide_furnace| A2: Gate Oxide]]
+[[Specific_Process_Knowledge/Thermal_Process/C2_Gate_Oxide_furnace| Gate Oxide (A2)]]
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-[[Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace| A3: Phosphorous Drive-in]]
+[[Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace| Phosphorous Drive-in (A3)]]
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-[[Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide| C1: Anneal Oxide]]
+[[Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide| Anneal Oxide (C1)]]
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-[[Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace| C3: Anneal Bond]]
+[[Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace| Anneal Bond (C3)]]
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-[[Specific_Process_Knowledge/Thermal_Process/Furnace_APOX| D1: APOX]]
+[[Specific_Process_Knowledge/Thermal_Process/Furnace_APOX| APOX (D1)]]
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 [[Specific_Process_Knowledge/Thermal_Process/Furnace_Noble| Noble furnace]]