Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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===Wet Oxidation on <100>=== | ===Wet Oxidation on <100>=== | ||
The curves below are based on measurements in our specific furnaces and give more accurate results. | The curves below are based on measurements in our specific furnaces and give more accurate results. We will still recommend to make minimum one test run if the thickness is very important. | ||
<gallery caption="Wet oxidation" widths="400px" heights="300px" perrow="2"> | <gallery caption="Wet oxidation" widths="400px" heights="300px" perrow="2"> | ||
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image:A3_furnace_100_Si_wet_oxidation.jpg|A3 Furnace <100>-Si Wet Oxidation | image:A3_furnace_100_Si_wet_oxidation.jpg|A3 Furnace <100>-Si Wet Oxidation | ||
</gallery> | </gallery> | ||
===Dry Oxidation on <100> and <111> wafer=== | ===Dry Oxidation on <100> and <111> wafer=== | ||