Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
| Line 104: | Line 104: | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
*Ar | *Ar | ||
*Wet annealing with bobbler (water steam + N<sub>2</sub>) | |||
| | | | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
| Line 104: | Line 104: | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
*Ar | *Ar | ||
*Wet annealing with bobbler (water steam + N<sub>2</sub>) | |||
| | | | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||