Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide: Difference between revisions
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!Stoichiometry | !Stoichiometry | ||
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Can probably be varied (sputter target: Ti, O2 added during deposition) | *Can probably be varied (sputter target: Ti, O2 added during deposition) | ||
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*A | *A | ||
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!Deposition rate | !Deposition rate | ||
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* | *3.0-3.5nm/min ± ? | ||
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* | * | ||
|- | |- | ||
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!Step coverage | !Step coverage | ||
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* | *Not Known | ||
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* | * | ||
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!Process Temperature | !Process Temperature | ||
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* | *Expected to be below 100<sup>o</sup>C | ||
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* | * | ||
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!More info on TiO2 | !More info on TiO2 | ||
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* | *[[/IBSD of TiO2|TiO2 made on IBE/IBSD Ionfab300]] | ||
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* | * | ||
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!Substrate size | !Substrate size | ||
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* | *1 50mm wafer | ||
* | *1 100mm wafer | ||
* | *1 150mm wafer | ||
* | *1 200mm wafer | ||
*Smaller pieces can be mounted with capton tape | |||
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*<nowiki>#</nowiki> small samples | *<nowiki>#</nowiki> small samples | ||
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!'''Allowed materials''' | !'''Allowed materials''' | ||
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* | *Almost any materials | ||
* | *not Pb and very poisonous materials | ||
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*Allowed material 1 | *Allowed material 1 |
Revision as of 15:16, 18 March 2014
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Deposition of Titanium Oxide
Titanium oxide can be deposited only by sputter technique. At the moment the only system where we have a target for Titanium oxide is IBE/IBSD Ionfab300. The target is Ti. During the sputter deposition oxygen is added to the chamber resulting in Titanium oxide on the sample.
Comparison of the methods for deposition of Titanium Oxide
Sputter technique using IBE/IBSD Ionfab300 | Sputter technique Lesker | |
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Stoichiometry |
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Film thickness |
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Deposition rate |
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Process Temperature |
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Step coverage |
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Film quality |
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Batch size |
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Material allowed |
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More process info on TiO2 |
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Sputter technique using IBE/IBSD Ionfab300 | Sputter System Lesker | |
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Generel description | Generel description - method 1 | Generel description - method 2 |
Stoichiometry |
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Film Thickness |
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Deposition rate |
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Step coverage |
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Process Temperature |
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More info on TiO2 |
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Substrate size |
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Allowed materials |
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