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| ==Wet HF-etch of bulk glass== | | ==Wet HF-etch of bulk glass== |
| {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
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| |-style="background:silver; color:black"
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| !
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| ![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Method 1]]
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| ![[Specific Process Knowledge/Thin film deposition/PECVD|Method 2]]
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| |-style="background:WhiteSmoke; color:black"
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| !Generel description
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| |Generel description - method 1
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| |Generel description - method 2
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| |-style="background:LightGrey; color:black"
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| !Parameter 1
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| *A
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| *B
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| {| border="2" cellspacing="0" cellpadding="4" align="center" | | {| border="2" cellspacing="0" cellpadding="4" align="center" |
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