Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions

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 *Deposition on one side of the substrate
 |
-*
+*Not Known
+*Deposition on one side of the substrate
 |-
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 *1 200 mm wafer
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-*
+*Pieces or
+*1x4" wafer or
+*1x6" wafer
 |-
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 *not Pb and very poisonous materials
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-*
+* Silicon
+* Silicon oxide
+* Silicon nitride
+* Silicon (oxy)nitride
+* Photoresist
+* PMMA
+* Mylar
+* SU-8
+* Metals
+* Carbon
 |-
 |}