Specific Process Knowledge/Thin film deposition/Deposition of TiW: Difference between revisions
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|Depending on process parameters, see [[/Sputtering of TiW in Wordentec|here.]] | |Depending on process parameters, see [[/Sputtering of TiW in Wordentec|here.]] | ||
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! Comments | |||
| TiW alloy: 10%/90% by weight | |||
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