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Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions

Kabi (talk | contribs)
Kabi (talk | contribs)
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|98% Sulfuric acid and Ammonium sulfate
|98% Sulfuric acid and Ammonium sulfate
|98% Sulfuric acid and Ammonium sulfate
|98% Sulfuric acid and Ammonium sulfate
|98% Sulfuric acid and Hydrogen peroxide 4:1 add H<sub>2</sub>O<sub>2</sub> to H<sub>2</sub>SO<sub>4</sub>
|98% Sulfuric acid and Hydrogen peroxide 4:1 First add H<sub>2</sub>SO<sub>4</sub> into a glass beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>.
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
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|80 <sup>o</sup>C
|80 <sup>o</sup>C
|80 <sup>o</sup>C
|80 <sup>o</sup>C
|~70 <sup>o</sup>C the chemicals will heat up to working temperature during mixing, '''therefore be careful!''' First pour H<sub>2</sub>SO<sub>4</sub> into the beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>.
|~70 <sup>o</sup>C the chemicals will heat up to working temperature during mixing, '''therefore be careful!''' First add H<sub>2</sub>SO<sub>4</sub> into a glass beaker then add H<sub>2</sub>O<sub>2</sub><sup>{{fn|1}}</sup>.
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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"