Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions
| Line 38: | Line 38: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~ | ~1-2 nm/min (Pure Al) | ||
| | | | ||
~60(??) nm/min | ~60(??) nm/min | ||
| Line 38: | Line 38: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~ | ~1-2 nm/min (Pure Al) | ||
| | | | ||
~60(??) nm/min | ~60(??) nm/min | ||