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Specific Process Knowledge/Wafer cleaning: Difference between revisions

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'''Wafers that go into the high temperature furnaces''' <br/>
===Wafers that go into the high temperature furnaces===
As a general rule all wafers that go into the high temperature furnaces need a full RCA clean directly before the furnace step.  
As a general rule all wafers that go into the high temperature furnaces need a full RCA clean directly before the furnace step.  
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Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Wafer_cleaning"