Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions
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* Metals | * Metals | ||
| | | | ||
Base materials:<br> | |||
*Silicon | |||
*Polymers with Tg > 70C | |||
Seed metals:<br> | |||
* NiV (75 - 100 nm recommended) | * NiV (75 - 100 nm recommended) | ||
* Ti (~5 nm) + Au (75-100 nm recommended) | * Ti (~5 nm) + Au (75-100 nm recommended) | ||