Specific Process Knowledge/Thin film deposition/Deposition of Tungsten: Difference between revisions

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| Layer thickness
| Layer thickness
|10Å to 1µm
|10Å to 5000Å
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| Deposition rate
| Deposition rate
|2Å/s to 15Å/s
|2Å/s to 15Å/s
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|-
|-style="background:WhiteSmoke; color:black"
!Allowed materials
|
* Silicon
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
|-style="background:Lightgrey; color:black"
!Comments
|
|}
|}

Revision as of 08:52, 7 March 2014

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Tungsten (W) can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.


E-beam evaporation (Alcatel)
Batch size
  • Up to 1x4" wafers
  • smaller pieces
Pre-clean RF Ar clean
Layer thickness 10Å to 5000Å
Deposition rate 2Å/s to 15Å/s
Allowed materials
  • Silicon
  • Silicon oxide
  • Silicon (oxy)nitride
  • Photoresist
  • PMMA
  • Mylar
  • SU-8
  • Metals
Comments