Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions
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! Layer thickness | ! Layer thickness | ||
|10Å to 1µm | |10Å to 1µm* | ||
|10Å to 1 µm | |10Å to 1 µm* | ||
|10Å to 1000Å | |10Å to 1000Å | ||
|. | |. | ||
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'''*''' ''For thicknesses above 200 nm permission from ThinFilm group (thinfilm@danchip.dtu.dk) is required.'' | |||
== Comments: Choise of equipment == | == Comments: Choise of equipment == | ||