Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions
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|Depending on process parameters, see [[Sputtering of Ti in Wordentec|here]]. | |Depending on process parameters, see [[Sputtering of Ti in Wordentec|here]]. | ||
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! Allowed substrates | |||
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* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
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* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
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* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
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* Silicon wafers | |||
* Quartz wafers | |||
* Pyrex wafers | |||
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|-style="background: | |-style="background:LightGrey; color:black" | ||
!Allowed materials | !Allowed materials | ||
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* SU-8 | * SU-8 | ||
* Metals | * Metals | ||
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! Comment | ! Comment | ||
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