Jump to content

Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

← Older editNewer edit →
VisualWikitext
Mdyma (talk | contribs)
danchip
584 edits
Mdyma (talk | contribs)
danchip
584 edits
Line 70: Line 70:


<nowiki>*</nowiki>These wafers must be placed in a "transport box from RCA to furnace" using the RCA carrier when doing RCA or the pre-dep carrier after pre-dep.
<nowiki>*</nowiki>These wafers must be placed in a "transport box from RCA to furnace" using the RCA carrier when doing RCA or the pre-dep carrier after pre-dep.
==Comparison method 1 and method 2 for the process==
{|border="1" cellspacing="1" cellpadding="7" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
|'''A1: Boron Drive-in'''
|'''A2: Gate Oxide'''
|'''A3: Phosphorous Drive-in'''
|'''C1: Anneal Oxide'''
|'''C3: Anneal Bond'''
|'''D4: APOX'''
|'''Noble furnace'''
|-
|-
|-style="background:WhiteSmoke; color:black"
!Generel description
|Generel description - method 1
|Generel description - method 2
|Generel description - method 3
|Generel description - method 4
|Generel description - method 5
|Generel description - method 6
|Generel description - method 7
|-
|-
|-style="background:LightGrey; color:black"
!Parameter 1
|
*A
*B
|
*A
*B
|
|
|
|
|
|-
|-
|-style="background:WhiteSmoke; color:black"
!Parameter 2
|
*A
*B
*C
|
*A
|
|
|
|
|
|-
|-
|-style="background:LightGrey; color:black"
!Substrate size
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|
|
|
|
|
|-
|-
|-style="background:WhiteSmoke; color:black"
!'''Allowed materials'''
|
*Allowed material 1
*Allowed material 2
|
*Allowed material 1
*Allowed material 2
*Allowed material 3
|
|
|
|
|
|-
|}
<br clear="all" />


==Oxidation curves==
==Oxidation curves==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/Oxidation"