Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 77: | Line 77: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Restrictions | !Restrictions | ||
| | |Type IV and resist/polymer on polymer substarte | ||
|Wafers with metal is not allowed | |Wafers with metal is not allowed | ||
|Resist is not allowed | |Resist is not allowed | ||