Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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The system is equipped with 2 different resists lines: | The system is equipped with 2 different resists lines: | ||
* | *AZ 5214E | ||
* | *AZ 4562 | ||
and | and | ||
*2 syringe lines, which can be used for spinning of e-beam resist. | *2 syringe lines, which can be used for spinning of e-beam resist. | ||