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Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions

Kabi (talk | contribs)
Kabi (talk | contribs)
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=135 7-up 6" info page in LabManager] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=69 7-up (masks) info page in LabManager]
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=135 7-up 6" info page in LabManager] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=69 7-up (masks) info page in LabManager]


'''The APV for working with piranha in fumehood can be found here
'''The APV for working with piranha in fumehood can be found by clicking'' [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=197 here]


===Comparing the 7-up cleans and Piranha clean===
===Comparing the 7-up cleans and Piranha clean===