Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
Appearance
| Line 15: | Line 15: | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=135 7-up 6" info page in LabManager] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=69 7-up (masks) info page in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=135 7-up 6" info page in LabManager] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=69 7-up (masks) info page in LabManager] | ||
'''The APV for working with piranha in fumehood can be found here | '''The APV for working with piranha in fumehood can be found by clicking'' [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=197 here] | ||
===Comparing the 7-up cleans and Piranha clean=== | ===Comparing the 7-up cleans and Piranha clean=== | ||