Specific Process Knowledge/Wafer cleaning/RCA: Difference between revisions
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*DI water rinsing (dumping three times) | *DI water rinsing (dumping three times) | ||
For procedure details please look in the [http://labmanager.danchip.dtu.dk/d4Show.php?id=1633&mach=243 user manual] in LabManager. | For procedure details please look in the [http://labmanager.danchip.dtu.dk/d4Show.php?id=1633&mach=243 user manual] in LabManager. | ||
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'''The user manual, user APV and contact information can be found in LabManager:''' | '''The user manual, user APV and contact information can be found in LabManager:''' | ||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=243 RCA info page in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=243 RCA info page in LabManager] | ||
==Overview of RCA process data== | ==Overview of RCA process data== | ||