Specific Process Knowledge/Wafer cleaning: Difference between revisions
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During processing it is sometimes mandatory, necessary or just recommended to clean the wafers. This can be done by different cleaning procedures depending on what the wafers have been exposed to where they are going to be further processed. Please consult the cross contamination scheme for to see whether your wafers need a cleaning before the next processing sequence. | During processing it is sometimes mandatory, necessary or just recommended to clean the wafers. This can be done by different cleaning procedures depending on what the wafers have been exposed to where they are going to be further processed. Please consult the cross contamination scheme for to see whether your wafers need a cleaning before the next processing sequence. | ||
==Comparison of Wafer Cleaning Methods== | ==Comparison of Wafer Cleaning Methods== | ||