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Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,146 edits
Line 72: Line 72:
|'''Batch size'''
|'''Batch size'''
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1-19/25 4" wafers or 4 masks at a time
1-25 4" or 6" wafers  
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1-25 4" or 6" wafers or 1-4 5" masks
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1-5 4" wafer at a time
1-5 4" wafer at a time
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Line 81: Line 83:
4-6" wafers
4-6" wafers
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2-4" wafers
4-6" wafers or 5" masks
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All sizes that can fit into the beaker in a dedicated holder
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|}
|}
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