Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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|'''Chemical solution''' | |'''Chemical solution''' | ||
|98% Sulfuric acid and Ammonium sulfate | |98% Sulfuric acid and Ammonium sulfate | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Process temperature''' | |'''Process temperature''' | ||
|80 <sup>o</sup>C | |80 <sup>o</sup>C | ||
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|'''Process time''' | |'''Process time''' | ||
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|'''Allowed materials''' | |'''Allowed materials''' | ||
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|'''Batch size''' | |'''Batch size''' | ||
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|'''Size of substrate''' | |'''Size of substrate''' | ||
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