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*[[/IMEC|IMEC]] - ''Cleaning before fusion bonding''
*[[/IMEC|IMEC]] - ''Cleaning before fusion bonding''
*[[/Cleaning with Soap Sonic|Soap Sonic]] - ''Cleaning of "dirty" wafers when entering the cleanroom''
*[[/Cleaning with Soap Sonic|Soap Sonic]] - ''Cleaning of "dirty" wafers when entering the cleanroom''
== [[Image:section under construction.jpg|70px]] Section under construction ==
==Comparison of Wafer Cleaning Methods==
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
![[Specific Process Knowledge/Wafer cleaning/RCA|RCA]]
![[Specific Process Knowledge/Wafer cleaning/7-up & Piranha|7-up & Piranha]]
![[Specific Process Knowledge/Wafer cleaning/cleaning with HF|5% HF]]
![[Specific Process Knowledge/Wafer cleaning/IMEC|IMEC]]
![[Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic|Soap Sonic]]
|-
|-
|-style="background:WhiteSmoke; color:black"
!Generel description
|Two step process to remove organics and metals
|Removes organics and alkali ions
|Removing native oxide
|Cleaning before wafer bonding
|Cleaning of "dirty" wafers when entering the cleanroom
|-
|-
|-style="background:LightGrey; color:black"
!Purpose
|Mandatory prior furnace processes
|When needed
|Together with RCA cleaning
|Prior to wafer bonding
|Cleaning very dirty items
|-
|-
|-style="background:WhiteSmoke; color:black"
!Substrate size
|
*<nowiki>#</nowiki>1-25 2", 4" and 6" wafers
|
*<nowiki>#</nowiki>1-25 2", 4" and 6" wafers
|
*<nowiki>#</nowiki>1-25 2", 4" and 6" wafers
|
*<nowiki>#</nowiki>1-25 2" and 4" wafers
|
*All sizes that can go into the bath
|-
|-
|-style="background:LightGrey; color:black"
!Allowed materials
|
*Silicon
*Poly Silicon
*Silicon Oxide
*Silicon Nitride
*Silicon Oxynitride
*Quartz/fused silica
|
*Silicon
*Poly Silicon
*Silicon Oxide
*Silicon Nitride
*Silicon Oxynitride
*Quartz/fused silica
*Pyrex and wafers with Cr ONLY in Mask cleaning bath or beaker
|
*Silicon
*Poly Silicon
*Silicon Oxide
*Silicon Nitride
*Silicon Oxy-nitride
*Quartz/fused silica
*Resists (depending on bath)
*Pyrex (depending on bath)
|
*Silicon
*Poly Silicon
*Silicon Oxide
*Silicon Nitride
*Silicon Oxynitride
*Quartz/fused silica
*Pyrex
|
*All materials
|-
|}
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