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Specific Process Knowledge/Etch/RIE (Reactive Ion Etch): Difference between revisions

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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
|style="background:WhiteSmoke; color:black"|<b>RIE1</b>
|style="background:WhiteSmoke; color:black"|<b>RIE1 '''HAS BEEN DECOMMISSIONED'''</b>
|style="background:WhiteSmoke; color:black"|<b>RIE2</b>
|style="background:WhiteSmoke; color:black"|<b>RIE2</b>
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