Specific Process Knowledge/Lithography/Coaters/SprayCoater: Difference between revisions
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The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager. It can be found be clicking Equipment -> Info or by using the direct link below. Then follow the 'User Manual' link. | The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager. It can be found be clicking Equipment -> Info or by using the direct link below. Then follow the 'User Manual' link. | ||
'''The user manual, user APV, technical information and contact information can be found in | '''The user manual, user APV, technical information and contact information can be found in LabManger''': | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]''' | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||