Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300: Difference between revisions

Revision as of 14:32, 28 August 2013 view source Bghe (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits →Etch ← Older edit		Revision as of 08:58, 21 February 2014 view source Bghe (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits →IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool Newer edit →
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	==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool==		==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool==
	[[Image:IBE_IBSD_udstyret_i_RR1.jpg\|500x500px\|thumb\|IBE IBSD: positioned in cleanroom 1]]		[[Image:IBE_IBSD_udstyret_i_RR1.jpg\|500x500px\|thumb\|IBE IBSD: positioned in cleanroom A-1]]