Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions
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== Resist Pyrolysis Furnace == | == Resist Pyrolysis Furnace == | ||
[[image:Resist_Pyrolysis_Furnace.jpg|500x500px|right|thumb|The Resist Pyrolysis furnace located in cleanroom area A-5]] | |||
The Resist Pyrolysis Furnace is used for resist pyrolysis, where samples with different resist layers are heated up to maximum 1000 <sup>o</sup>C in a nitrogen atmosphere. At high temperatures carbon is formed by pyrolysis of the resist. In this way conductive structures can be made from a resist patterned sample. | The Resist Pyrolysis Furnace is used for resist pyrolysis, where samples with different resist layers are heated up to maximum 1000 <sup>o</sup>C in a nitrogen atmosphere. At high temperatures carbon is formed by pyrolysis of the resist. In this way conductive structures can be made from a resist patterned sample. | ||
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'''The user manual, user APV and contact information can be found in LabManager:''' | '''The user manual, user APV and contact information can be found in LabManager:''' | ||
[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=294 Resist Pyrolysis Furnace] | [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=294 Resist Pyrolysis Furnace] | ||