Specific Process Knowledge/Thin film deposition: Difference between revisions
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*[[Specific Process Knowledge/III-V Process/thin film dep/physimeca|Physimeca]] - ''E-beam evaporator (III-V lab)'' | *[[Specific Process Knowledge/III-V Process/thin film dep/physimeca|Physimeca]] - ''E-beam evaporator (III-V lab)'' | ||
*[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] - ''Sputter deposition of high quality optical layers and milling/etching'' | *[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] - ''Sputter deposition of high quality optical layers and milling/etching'' | ||
*[[/Sputter coater#The_Hummer_Sputter_coater|Sputter coater Hummer]] - ''Gold sputtering system'' | *[[/Sputter coater#The_Hummer_Sputter_coater|Sputter coater Hummer]] - ''Gold sputtering system'' | ||
*[[/Sputter coater#The_Balzer_Sputter_coater|Balzer Sputter coater]] - ''Gold sputtering system'' | *[[/Sputter coater#The_Balzer_Sputter_coater|Balzer Sputter coater]] - ''Gold sputtering system'' | ||